JPH0252430U - - Google Patents
Info
- Publication number
- JPH0252430U JPH0252430U JP13273988U JP13273988U JPH0252430U JP H0252430 U JPH0252430 U JP H0252430U JP 13273988 U JP13273988 U JP 13273988U JP 13273988 U JP13273988 U JP 13273988U JP H0252430 U JPH0252430 U JP H0252430U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- coating device
- resist coating
- damper
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13273988U JPH0252430U (en]) | 1988-10-11 | 1988-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13273988U JPH0252430U (en]) | 1988-10-11 | 1988-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252430U true JPH0252430U (en]) | 1990-04-16 |
Family
ID=31389980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13273988U Pending JPH0252430U (en]) | 1988-10-11 | 1988-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252430U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021136263A (ja) * | 2020-02-25 | 2021-09-13 | 東京エレクトロン株式会社 | 液処理装置及び液処理方法 |
-
1988
- 1988-10-11 JP JP13273988U patent/JPH0252430U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021136263A (ja) * | 2020-02-25 | 2021-09-13 | 東京エレクトロン株式会社 | 液処理装置及び液処理方法 |